OPTICAL COMPONENT MADE OF SILICA GLASS AND METHOD FOR THE PRODUCTION THEREOF

摘要

An optical component for transmitting ultraviolet radiation having a wavelength of 250 nm and less and made of synthetic silica glass, which is produced by subjecting a chlorine-free silicon compound to flame hydrolysis, which is shaped in the form of fine-grained SiO2, deposited on a substrate and directly vitrified is already known in prior art. Based on the above-mentioned optical component, the invention aims at providing an optical component exhibiting high long-time stability for the transmission of ultraviolet radiation with a wavelength of 250 nm and less and particularly a behavior in case of deterioration in which induced absorption leads to low level saturation. To this end, the silica glass has a hydrogen content of less than 5x10<16> molecules/cm<3>. A method for the production of the optical component includes the production of a synthetic hydrogen-containing silica glass by synthesis of fine-grained SiO2 by means of flame-hydrolysis of a chlorine-free silicon compound and depositing and vitrifying the fine-grained SiO2 on a substrate to form the hydrogen-containing silica glass, wherein the hydrogen-containing silica glass is subjected to a hydrogen reduction treatment, wherein its hydrogen content is set to a value under 5x10<16> molecules/cm<3>.