Producing an amorphous or polycrystalline silicon layer on an insulation region, especially for a bipolar transistor for high speed applications, uses a nucleation layer to improve nucleation

摘要

Amorphous or polycrystalline silicon layer production on an insulation region (14), using a nucleation layer (28) to improve nucleation, is new. Preferred Features: The amorphous or polycrystalline layer (19) consists of silicon-germanium and the insulation region (14) consists of SiO2. The nucleation layer is a silicon nitride layer.