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发明名称
Sensor-Bauelement
摘要
申请公布号
DE19626083(C2)
申请公布日期
2000.03.23
申请号
DE19961026083
申请日期
1996.06.28
申请人
SIEMENS AG
发明人
WINTERER, JUERGEN;BEER, GOTTFRIED
分类号
G01L9/00;G01L19/00;(IPC1-7):H01L25/04;H01L21/60;G01L23/10
主分类号
G01L9/00
代理机构
代理人
主权项
地址
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