A magnetically actuated ink jet printing device

摘要

A magnetically actuated ink jet printing device for use in an ink jet printer ejects ink droplets by deforming a diaphragm (38) with the force generated on an electrode (40) in a magnetic field when an electric current pulse is applied thereto. In one embodiment, the diaphragm (38) of the device is provided by anisotropically etching a silicon substrate (32) with an etch stop which provides a thin membrane of silicon material for use as the diaphragm (38). An electrode (40) having an input and output terminal (45, 42) is patterned over the diaphragm (38) and a sacrificial layer (64) is deposited over the silicon substrate surface containing the diaphragm (38). The sacrificial layer (64) is patterned to subsequently provide the ink ejection chamber (49) over the diaphragm (38). A patternable layer (44) is deposited over the silicon substrate surface including the sacrificial layer and patterned to provide the nozzles (46) and expose the electrode terminals (45, 42). The sacrificial layer (64) is removed and an ink supply is connected to the space previously occupied by the sacrificial layer (64). Magnetic field generating means having a predetermined magnetic field strength are placed adjacent the device, and electric current applied to the electrode terminals (45, 42) in a predetermined direction relative to the magnetic field produces a force necessary to deform the diaphragm (38) and eject an ink droplet from the nozzles (46) of the printing device.