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发明名称
Simulation mesh generation method, apparatus, and program product
摘要
申请公布号
EP0893773(A3)
申请公布日期
2000.03.22
申请号
EP19980113920
申请日期
1998.07.24
申请人
NEC CORPORATION
发明人
SYO, TOSHIYUKI
分类号
H01L29/00;G06F17/50;G06T17/20;H01L21/00;(IPC1-7):G06F17/50
主分类号
H01L29/00
代理机构
代理人
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