发明名称 Method of manufacturing a plurality of semiconductor bodies
摘要 Semiconductor chips are produced by depositing identical semiconductor layer sequences (18) onto the wafer surface exposed by windows in a patterned masking layer (4) and then separating the wafer between the structures to produce individual chips.
申请公布号 EP0903792(A3) 申请公布日期 2000.03.22
申请号 EP19980117796 申请日期 1998.09.18
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 HAERLE, VOLKER, DR.
分类号 H01L21/205;H01L33/00;H01S5/02 主分类号 H01L21/205
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