| 摘要 |
<p>PROBLEM TO BE SOLVED: To uniformly deposit carbon or carbon compound on a conductive film and a crack and reduce dispersion of an electron emission quantity of an element by forming a groove on a portion of a constituting material of the electron emission element on a substrate and an area of the conductive film. SOLUTION: A light from a KrF excimer laser beam source 1 is reduced to 1/5 and projected to a workpiece 13 of an electron emission element by a mask pattern 10 through a lens and a mirror of symbols of 2 to 9, 12 for making an energy distribution of a light flux uniform to form a groove having a rectangular section having a width of 1μm and a depth of 0.1μm on a conductive film of the electron emission element. While a resistance of the conductive film of the electron emission element is monitored, an energization forming is carried out that a triangular wave pulse voltage having a peak voltage of 15 V and a pulse width of 1 msec is applied at an interval of 10 msec until the resistance becomes a constant resistance to form a crack along the groove of the conductive film. The crack does not stick out to the outside of the groove, however, the crack is meandered inside the groove and is formed on the vicinity of a bottom surface edge of the groove rather than the center portion of the groove.</p> |
