| 摘要 |
PROBLEM TO BE SOLVED: To control two planes to be paralleled by a simple configuration by providing plural displacement detecting means consisting of capacitance sensors arranged on the planes composed of one plane with a probe thereon and another plane forming a recording medium opposed to each other in a device. SOLUTION: Probes are arranged on an upper electrode substrate 104, and a lower electrode substrate 103 forms a recording medium plane, and these substrates compose an information processing device. On the upper and lower electrode substrates 104, 103, pairs of electrode probes 101, 102 for displacement detection are arranged to compose three sets of capacitance sensors. An actuator drive unit 106 supports three actuators 105, and drives the upper electrode substrate 104 in the direction perpendicular to the lower electrode substrate 103 plane at the position of the electrode probes 101 for displacement detection. A surface matching control circuit 107 receives a variation signal of the capacitance from the capacitance sensors and measures a distance between the upper and lower electrode substrates 103, 104, and drives the actuators 105 based thereon.
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