| 摘要 |
PROBLEM TO BE SOLVED: To reduce pollutant such as particles clogging nozzles during use by cleaning the interior of a cartridge by a gas not including pollutants, e.g. chemically produced nitrogen or the like under a pressure in two alternate directions and in a bilateral direction at least once. SOLUTION: A gas such as chemically produced nitrogen not including pollutants, highly filtered air or the like is held in a tank 90 without any pollutants under a pressure of approximately 50-120 psi. The tank 90 is connected to a four-position valve 94 via a conduit 92. At a first position, the gas being pressured in the tank 90 is fed to a conduit 72 and a valve in a conduit 82 connects the conduit 82 to a vacuum generator 96. The gas received at the vacuum generator 96 passes a silencer 97 and a microfilter 99, so that no pollutant is discharged to a clean room. A microprocessor programs to control, switch a valve position to change a flow direction of the gas. |
