发明名称 |
Method of manufacturing a diamond vacuum device |
摘要 |
This invention discloses a method of manufacturing a diamond vacuum device, and more particularly a method of manufacturing a diamond vacuum device which uses a diamond thin film as an electron emitter by electric field. The present invention presents a method of manufacturing a vacuum device for use in high speed, high voltage, using diamond having a negative electron affinity, which can emit electrons even at a low voltage and is also resistant to chemical variations.
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申请公布号 |
US6040001(A) |
申请公布日期 |
2000.03.21 |
申请号 |
US19980136614 |
申请日期 |
1998.08.20 |
申请人 |
ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE |
发明人 |
PAEK, MUN CHEOL;CHOI, SUNG WOO;NAM, KEE SOO |
分类号 |
H01L29/68;H01J9/02;H01J21/10;(IPC1-7):B05D5/12;C23C16/00 |
主分类号 |
H01L29/68 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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