Analysis method for gases and apparatus therefor

摘要

PCT No. PCT/JP98/01608 Sec. 371 Date Dec. 7, 1998 Sec. 102(e) Date Dec. 7, 1998 PCT Filed Apr. 8, 1998 PCT Pub. No. WO98/45686 PCT Pub. Date Oct. 15, 1998A method for analyzing an impurity in a gas including the steps of: introducing a gas with an impurity into a first cell; introducing a gas with no impurity into a second cell; maintaining identical pressures in the first and second cells; irradiating a light from a light irradiating source; varying the frequency of the light over a frequency spectrum including an absorption frequency of the impurity; splitting the light by a splitting device in order to pass a first beam through the first cell and to pass a second beam through the second cell; measuring the intensity of the light passing through the first cell over the frequency spectrum with a first measuring device and the intensity of the light passing through the second cell over the frequency spectrum with a second measuring device; and determining an absorption spectrum of the impurity in the gas based on the difference between data measured with the first measuring device and data from measured with the second measuring device.