| 摘要 |
PROBLEM TO BE SOLVED: To reduce the movement of a fluid in a valve outlet accompanying the opening and closing of a valve and to perform a precise flow control by providing a passage on a substrate, forming a groove vertically to the passage, providing a valve structure within the groove, and providing an actuator vertically moved to the passage of the valve structure. SOLUTION: A passage 106 is provided on a substrate 101, and a groove 102 is partially provided on the passage 106. A valve structure 103 integrally having a valve part 112 is connected into the groove 102 to form an actuator 103 actively extended and contracted according to an external signal. The surface of the valve structure 103 and groove 102 is subjected to water repellent treatment to enhance the sealing property. A fluid is carried in the passage 106 in arrowed directions 107, 108, and the actuator 104 for controlling this flow is actively extended/contracted or moved in the direction 105 according to an external signal. The valve structure 103 is then moved in the direction of blocking the flow as shown by an arrow 109. Since both the valve part 112 and the groove 102 have water repellency, the clearance between the both blocks the flow.
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