发明名称 Simple, low cost, laser absorption sensor system
摘要 A laser absorption sensor system for performing optical measurements on a sample is described. The sensor system includes a tunable laser, capable of being tuned at rates exceeding 1 KHZ, and with a tuning range approaching 1 GHz. The laser beam is modulated at a modulation frequency between 1 and 100 KHz. Modulation in this frequency range is termed wavelength modulation. The beam is split into two beams, a signal beam and a reference beam. The signal beam traverses the sample where characteristic absorption takes place and is incident on a signal photodetector. The reference beam is incident directly on a reference photodetector. A noise cancellation circuit combines signal and reference photo-currents from signal and reference photodetectors reducing signal noise and increasing system sensitivity. The combination of wavelength modulation and the noise cancellation scheme provide a highly sensitive simple, rugged, low cost laser absorption sensor system.
申请公布号 US6040914(A) 申请公布日期 2000.03.21
申请号 US19970872617 申请日期 1997.06.10
申请人 NEW FOCUS, INC. 发明人 BORTZ, MICHAEL L.;GODIL, ASIF A.
分类号 G01J3/433;G01N21/39;(IPC1-7):G01N21/31 主分类号 G01J3/433
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