| 摘要 |
PROBLEM TO BE SOLVED: To provide an inverter system DC power source, wherein outflow of stored energy from a smoothing capacitor is minimized when abnormal discharge is generated in a load, damage of an anode, a cathode, etc., is reduced, and film formation of high quality. SOLUTION: Two systems of single phase inverter circuits which enable high-frequency output of a rectifying/smoothing circuit 12 are arranged in parallel. Secondary windings of high frequency transformers 25, 35 which make the high frequency voltages in the two systems of inverter circuits high voltages are made, e.g. V-type connections, and full-wave rectification is performed with a rectifier circuit in a post stage. On/off operation of the inverter circuit of the respective systems are so controlled that the shift in the respective phases of a three-phase AC which are constituted of outputs of the above rectifier circuit becomesπ/3. It is also possible to make the shift of phase in the output of the rectifier circuit to becomeπ/2. It is preferable that this inverter system DC power source supply power to a load having high possibility that an abnormal current due to short circuit or the like flows.
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