PIEZORESISTIVE PRESSURE TRANSDUCER WITH A CONDUCTIVE ELASTOMERIC SEAL

摘要

low cost piezoresistive pressure transducer utilizing premolded elastomeric seals in which at least owe seal is electrically conductive. A piezoresistive stress sensitive element in the form of a diaphragm of semiconductor material having a thickened rim is held at its rim between a pair of premolded elastomeric seals in a two piece housing. Electrical connections with eternal circuitry are made by conductive paths through one of the elastomeric seals which makes contact with electrical leads which pass through the housing wall.