发明名称 BULK SUPPLYING DEVICE OF SEMICONDUCTOR PROCESS GAS
摘要 PROBLEM TO BE SOLVED: To safely supply a gas without deteriorating the purity of the gas in a cylinder by connecting a cylinder valve to one of two openings, and connecting a gas takeout unit consisting of the cylinder valve and a pressure reducting valve to the other opening, and housing the bomb in a container. SOLUTION: Cylinder valves 6a, 6b are mounted on two opening parts arranged on both ends of a gas cylinder 2, respectively. A pressure reducting valve 8 is arranged on the gas supplying-side cylinder valve 6a through, for example, a diaphragm type pressure gauge 10 to form a takeout unit U, which is connected to a gas supplying piping 25, and the cylinder valve 6b is used for gas filling. Gas sampling simplex tubes 13 extended from an alarm 11 are inserted to a space 7 and a section 9, respectively, to regularly monitor gas leakage. Accordingly, a high-pressure gas part which is apt to cause the gas leakage is contracted and also limited within a container, so that this device is operated as a highly safe supplying device.
申请公布号 JP2000081196(A) 申请公布日期 2000.03.21
申请号 JP19980250089 申请日期 1998.09.03
申请人 NIPPON SANSO KK 发明人 HANESAKA SATOSHI;SEKI HIDEKI;AIDA TOMOYUKI;HOSHI TOMOAKI;KUROIWA HOMARE
分类号 F17C1/00;F17C13/00;F17C13/02;F17C13/08;H01L21/205;(IPC1-7):F17C1/00 主分类号 F17C1/00
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