| 摘要 |
PROBLEM TO BE SOLVED: To uniformly recover the whole surface of an abrasive pad by specifying a radius of the abrasive pad and that of a grinding wheel, and limiting a moving distance of the grinding wheel within a specific range when an abrasive pad surface of an abrasive disc is recovered by the grinding wheel of the pad conditioning. SOLUTION: When a disc-shaped or annular grinding wheel 16a of a pad conditioning is pressed to an abrasive pad surface 3a of a platen as an abrasive disc, and both of the abrasive pad 3a and the grinding wheel 16a are rotated to recover the abrasive pad 3a, the number of revolutions of the grinding wheel 16a is fixed, and that of the abrasive pad 3a is variable. R is more than 2r when a radius of the abrasive pad 3a is R, and that of the grinding wheel 16a is (r). By the simulation to make a peripheral speed of an abrasive pad position contacted with the grinding wheel 16a constant at all times, a moving distance of the grinding wheel 16a is determined from r/2 to (R-r/2) in maximum, and from (r) to (R-r) in minimum relative to a central point 0 of the abrasive pad. |
