| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for forming a diamond like carbon film capable of forming a diamond like carbon film on the body to be treated at a high film forming rate regardless electric properties and thickness of the body to be treated and also without specially applying a bias to the body to be treated. SOLUTION: The inside of a reaction chamber C4 stored with the body to be treated is filled with a gaseous starting material contg. carbon atoms and hydrogen atoms under low pressure, and, in this reaction chamber, electron beams generated by a cathode electrode 14 and accelerated by an accelerating electrode 13 are made incident on the body to be treated, by which the body to be treated is negatively charged, and also, the electrons are collided with the molecules of the gaseous starting material to generate the radicals of hydrocarbon, and these radicals are absorbed into the negatively charged body to be treated to form a diamond like carbon film on the body to be treated.
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