| 摘要 |
PROBLEM TO BE SOLVED: To form an intermediate layer and a hard carbon film at uniform film thickness on the inner circumferential face of a cylindrical member such as various bushes, piston cylinders or the like and to remarkably improve the wear resistance of the inner circumferential face. SOLUTION: A cylindrical member 11 is arranged in a vacuum tank 13, and an auxiliary electrode 23 composed of an intermediate layer material is inserted into an opening 11a forming the inner circumferential face 11b thereof. Then, a sputtering gas is introduced into the vacuum tank 13 to generate plasma around it by applying voltage to the auxiliary electrode 23, and the intermediate layer material is sputtered to form an intermediate layer on the inner circumferential face 11b of the cylindrical member 11. After that, the electric potential of the auxiliary electrode 23 is made the grounded one, a gas contg. carbon such as methane or the like is introduced into the vacuum tank 13, and voltage is applied to the cylindrical member 11 to generate plasma in the vacuum tank 13, by which a hard carbon (DLC) film is formed on the intermediate layer at the inner circumferential face 11b of the cylindrical member 11 by a plasma CVD method.
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