| 摘要 |
PROBLEM TO BE SOLVED: To reduce the total ammonia concentration in a semiconductor device manufacturing factory by installing an ammonia removing chemical filter in a clean locker for storing a white robe, and adsorbing ammonia component produced by a worker's expiration and sweat while the white robe is stored. SOLUTION: When a front door 15 of a clean locker 1 is opened to store a white robe 17 in a clothes storing part 2 of the locker 1, air of high cleaniness is blown out to the white robe 17 by the operation of an air fan 7 and a high performance filter 8 to remove dust from the white robe 17. The air contaminated with dust is circulated through a contaminated air discharge port 9 provided in the lower part of the locker 1 and a circulating air passage 5 to be cleaned by the high performance filter 8. At this time ammonia component in the circulated air is adsorbed by a chemical filter for removing ammonia disposed in the passage of the underfloor space 4. The chemical filter 14 is wound up according to the output of an ammonia sensor 10 to regenerate the cleaning part.
|
