发明名称 ADJUSTING DEVICE
摘要 PROBLEM TO BE SOLVED: To be functioned with high-precision and to be functioned even when inclination is to be taken into consideration. SOLUTION: An adjusting device comprises a transmission device and especially a spindle 1 to convert a rotational motion into a linear motion for coarse adjustment; a spindle nut 4 operated in coordination with the spindle; and a piezoelectric linear adjusting element 2 arranged in series therewith for precise adjustment. A piezoelectric linear adjusting element 2 is released from a force and a moment from a lateral direction by cardan couplings 8 and 9 arranged between an object receiving part 6 and a spindle 1.
申请公布号 JP2000081101(A) 申请公布日期 2000.03.21
申请号 JP19990200009 申请日期 1999.07.14
申请人 CARL ZEISS:FA 发明人 SCHEIBL LOTHAR;HOF ALBRECHT DR
分类号 F16D3/40;F16H25/20;G01B7/00;H01L41/09;(IPC1-7):F16H25/20 主分类号 F16D3/40
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