| 摘要 |
PROBLEM TO BE SOLVED: To provide a CVD device capable of removing granular foreign matters and capable of producing a magnetic recording medium small in defects at the time of forming a DLC film by a CVD method. SOLUTION: A PET base film 1 with a magnetic layer is fed from an unwinding roll 7 to a main roll 9 in a vacuum tank 6, and, by a plasma CVD method, a DLC protective film is formed on the magnetic layer. After that, via a guide roll 8, by a sheet 10 for dusting provided directly before the winding roll 11, the DLC film forming face is subjected to cleaning.
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