| 摘要 |
PROBLEM TO BE SOLVED: To provide a beam profile monitor with beam current detecting function. SOLUTION: Plural rectangular conductive plates 11a-11d, lined up in a plane orthogonal to an ion beam B travelling direction, are set so as to turn about axes in a longitudinal direction orthogonal to the travelling direction of the ion beam B. The plural conducting plates 11a-11d are insulated from each other. The current passing through the respective conductive plates 11a-11d are detected in the condition in which the respective conductive plates 11a-11d are turned to form gaps between them. Thereby, the spread of the ion beams can be detected. Furthermore, the sum of currents passing through all the conductive plates 11a-11d is detected in the condition in which the plural conductive plates 11a-11d are turned toward the direction which is nearly orthogonal to the travailing direction of the beam so as to close the gaps between them and to detect a beam current.
|
