| 摘要 |
The present invention is an optical system for profiling a surface of an object. The optical system includes a projection system for directing an incident beam of light having a varying intensity pattern onto the surface of the object. The projection system includes a filter or the like for reducing or attenuating high order harmonics from the varying intensity pattern. The varying intensity pattern of the incident light beam is spatially shifted N times, where N is greater than 2. A detector array is arranged relative to the surface of the object to receive a reflected deformed grating image of the surface. A processing system, coupled to the detector array, determines a surface profile of the object based on a number of the deformed grating image at different spatial phases.
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