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发明名称
摘要
申请公布号
JP3023322(B2)
申请公布日期
2000.03.21
申请号
JP19970067378
申请日期
1997.03.04
申请人
发明人
分类号
C23C8/26;(IPC1-7):C23C8/26
主分类号
C23C8/26
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代理人
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