VORRICHTUNG ZUM MATERIALBESCHICHTEN GROSSFLÄCHIGER SUBSTRATE,申请号DE19966003079T-传众专利搜索

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发明名称	VORRICHTUNG ZUM MATERIALBESCHICHTEN GROSSFLÄCHIGER SUBSTRATE
摘要
申请公布号	DE69603079(T2)	申请公布日期	2000.03.16
申请号	DE19966003079T	申请日期	1996.04.23
申请人	COMMISSARIAT A L'ENERGIE ATOMIQUE	发明人	IDA, MICHEL;PERRIN, AIME;BOREL, MICHEL;CHARLES, RAYMOND
分类号	C23C14/24;C23C14/50;H01J9/02;(IPC1-7):C23C14/24	主分类号	C23C14/24
代理机构		代理人
主权项
地址

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