VERBESSERTES SYSTEM FÜR DIE MOTIVGENERIERUNG MITTELS EINES LASERS

摘要

A beam steering apparatus (502) for use in a laser pattern generation apparatus, having a steering mirror (602) for deflecting the radiant energy beam to a first point in space, a second steering mirror (604) for deflecting the radiant energy beam to a second point in space, and a position detection means (605-608) comprising a first beam splitting means (605) for creating an alignment beam from said radiant energy beam, a second beam splitting means (606) for creating a first positional beam and a second positional beam from said alignment beam, a first sensor (608) to detect the position of said radiant energy beam at said first point in space from said first positional beam, and a second sensor (607) to detect the position of said radiant energy beam at a second point in space from said second positional beam.