Micromechanical rotation rate sensor to measure tilting by Coriolis force in container filled with liquid uses ductile membrane, supplied with piezoelectrically stimulated elements

摘要

A closed container (1), filled with a liquid, swivels in a frame (3). One of its sides is formed by a ductile membrane (21), supplied with piezoelectrically stimulated elements (22). A sufficiently strong stimulation in the membrane creates a variable progressive wave, causing rotating motion in the container's liquid. As the unit turns, Coriolis force causes the container to rotate, and the rotation is measured.