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经营范围
发明名称
PLASMA CVD APPARATUS
摘要
申请公布号
KR200162012(Y1)
申请公布日期
2000.03.15
申请号
KR19990001631U
申请日期
1999.02.04
申请人
NEC CORPORATION
发明人
YAMAMORI, SHUKI
分类号
H01L21/205;(IPC1-7):H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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