LIQUID CARRYING SYSTEM

摘要

PURPOSE: A liquid carrying system is provided to improve the equality of a film and the reproducibility of a process in the next process by preventing the condensation of a reactive material remaining in a feed pipe and an exhaust pipe. CONSTITUTION: The liquid carrying system is formed by:a reactive material feed pipe(12) installed between a liquid material tank(10) which stores a liquid material and a reactor which performs the film forming process to move the raw material; a pressure gauge(14) measuring the pressure of the liquid material in the liquid material tank; a first flow controller(16) controlling the feed amount of a liquid material; and a vaporizer(18) converting the liquid material into gas by vaporizing the material to perform the reaction in the reactor.