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发明名称
DIFFUSION APPARATUS AND METHOD OF MASK ALIGN USING THE SAME
摘要
申请公布号
KR100246857(B1)
申请公布日期
2000.03.15
申请号
KR19970013870
申请日期
1997.04.15
申请人
SAMSUNG ELECTRONICS CO, LTD.
发明人
KIM, YU KWEON;KIM, HYUNG SOO
分类号
H01L21/027;(IPC1-7):H01L21/027
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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