| 摘要 |
<p>An arc jet CVD system (10) includes a plurality of plasma jet distribution heads (18). The distribution heads (18) are preferably linearly arranged, preferably angled relative to a line normal to the substrate surface on which a diamond film is being coated, and preferably spaced relatively apart with respect to a defined profile width. In addition, the plasma jets are preferably configured in accord with a defined parameter which is a function of the reagent gas flow and viscosity, the distance between the distribution heads (18) and the substrate (32), and the area on the substrate exposed to the gas from a distribution head (18). Configuring the plasma in accordance with the defined parameter-ensures an acceptable minimum level of efficiency with respect to hydrogen reagent use, and further provides a relatively uniform diamond film coating on a substrate. <IMAGE></p> |
