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发明名称
METHOD FOR MANUFACTURING FIELD OXIDATION FILM
摘要
申请公布号
KR100248813(B1)
申请公布日期
2000.03.15
申请号
KR19930010824
申请日期
1993.06.14
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
GONG, UI SAM;YUN, YONG HYOG;LEE, BYONG SOG
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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