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发明名称
HEATER BLOCK
摘要
申请公布号
KR100249391(B1)
申请公布日期
2000.03.15
申请号
KR19970078761
申请日期
1997.12.30
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
YOO JIN SIK
分类号
H01L21/324;C23C14/50;C23C14/54;H01L21/00;(IPC1-7):H01L21/324
主分类号
H01L21/324
代理机构
代理人
主权项
地址
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