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发明名称
RETICLE ALIGNMENT METHOD USING CAPACITANCE SENSOR
摘要
申请公布号
KR100249789(B1)
申请公布日期
2000.03.15
申请号
KR19970071611
申请日期
1997.12.22
申请人
KOREA ELECTRONICS & TELECOMMUNICATIONS RESEARCH INSTITUTE
发明人
KIM DO HUN;JUNG HAE BIN;KIM BO WOO
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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