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发明名称
EXTERNAL HIGH VOLTAGE CONTROL FOR A LASER SYSTEM
摘要
申请公布号
KR100246489(B1)
申请公布日期
2000.03.15
申请号
KR19970004413
申请日期
1997.02.14
申请人
CYMER INC.
发明人
DAS, PALASH P.;MIXON, CURTISS L.;EIS, RICHARD A.;PYANE, JAMES D.
分类号
H01S3/097;H01S3/134;H01S3/225;(IPC1-7):H01S3/00
主分类号
H01S3/097
代理机构
代理人
主权项
地址
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