Method and device to prevent deposits in a turbomolecular pump having magnetic or gas bearings

摘要

The deposition perturbation removal method is applied to a turbo-molecular pump having several stages (6,7,16-18;8-10,19) with magnetic paddles (13,14). The deposition perturbation is removed by injecting an active gas to a specific area which stirs up the generator molecules removing perturbations.