METHOD FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE HAVING ELASTOMER

摘要

A semiconductor chip packaging method includes the provision of individual elastomer chip carriers cut from an elastomer sheet having a uniform thickness and smooth, parallel surfaces. The elastomer sheet is mounted on an adhesive tape held by a fixing member, such as a support ring, and is then divided into individual carriers. The carrier is attached to a circuit interposer, and a semiconductor chip is attached to the carrier. Circuit leads of the interposer are bonded to connection pads on the chip. The beam lead bonding area is then encapsulated, and conductive bumps are formed on the underside of the package to serve as input/output terminals for the packaged device. Using this method, an number of devices can be packaged simultaneously on a flexible sheet and then separated into individual devices by cutting the sheet between the devices.