APPARATUS FOR DETECTING WAFER INSERTION STATUS,申请号KR19990000577U-传众专利搜索

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发明名称	APPARATUS FOR DETECTING WAFER INSERTION STATUS
摘要
申请公布号	KR200164997(Y1)	申请公布日期	2000.03.15
申请号	KR19990000577U	申请日期	1999.01.19
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	BAE, KYOUNG-JEONG;SONN, KWON
分类号	H01L21/66;(IPC1-7):H01L21/66	主分类号	H01L21/66
代理机构		代理人
主权项
地址

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