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发明名称
METHOD FOR FORMING METAL LINE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
KR100249130(B1)
申请公布日期
2000.03.15
申请号
KR19970077313
申请日期
1997.12.29
申请人
HYUNDAI ELECTRONICS IND. CO.,LTD
发明人
LEE, JAE-DONG;CHANG, HOON
分类号
H01L21/28;(IPC1-7):H01L21/28
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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SCHILD.
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LASCHENGLIED, INSBESONDERE GABELLASCHE FUER FOERDERKETTEN, VORZUGSWEISE FUER TROGKETTENFOERDERER.
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