ANALYZER FOR ION IMPLANTING EQUIPMENT,申请号KR19970018575-传众专利搜索

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发明名称	ANALYZER FOR ION IMPLANTING EQUIPMENT
摘要
申请公布号	KR100249307(B1)	申请公布日期	2000.03.15
申请号	KR19970018575	申请日期	1997.05.13
申请人	SAMSUNG ELECTRONICS CO, LTD.	发明人	KIM, HAN-SUNG
分类号	H01J37/05;(IPC1-7):H01L21/265	主分类号	H01J37/05
代理机构		代理人
主权项
地址

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