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发明名称
WAFER HEATING APPARATUS
摘要
申请公布号
KR100246314(B1)
申请公布日期
2000.03.15
申请号
KR19960064089
申请日期
1996.12.11
申请人
HYUNDAI MICRO ELECTRONICS CO.,LTD.
发明人
KIM, JUNG-JU
分类号
H01L21/20;(IPC1-7):H01L21/20
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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