| 摘要 |
PROBLEM TO BE SOLVED: To provide a means for dealing with a difficulty in the assurance of pitch accuracy of a large-sized substrate of color filters for a liquid crystal display device. SOLUTION: The same low-expansion glass as the glass of the color filter substrate for the liquid crystal display device is used as a substrate of a photomask an the photomask 2 formed by using the same is installed vertically and is exposed. The exposure device has a mask frame 1 disposed in such a manner that the non-pattern part in the central part of the mask pattern passes the rib 11 contg. temp. controllable cooling piping 14 and piping 13 for adsorption. |
