发明名称 |
Method of fabricating flat FED screens |
摘要 |
The microtips of charge emitting material, which define the cathode of the flat FED screen and face the grid of the screen, are tubular and have portions with a small radius of curvature. The microtips are obtained by forming openings in the dielectric layer separating the cathode connection layer from the grid layer, depositing a conducting material layer to cover the walls of the openings, and anisotropically etching the layer of conducting material to form inwardly-inclined surfaces with emitting tips. Subsequently, the portions of the dielectric layer surrounding the microtips are removed.
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申请公布号 |
US6036566(A) |
申请公布日期 |
2000.03.14 |
申请号 |
US19970942477 |
申请日期 |
1997.10.02 |
申请人 |
SGS-THOMSON MICROELECTRONICS S.R.L. |
发明人 |
BALDI, LIVIO;MARANGON, MARIA SANTINA |
分类号 |
H01J1/304;H01J9/02;H01J29/04;H01J31/12;H01L29/66;(IPC1-7):H01J9/02 |
主分类号 |
H01J1/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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