ULTRASHORT-PULSE HIGH-VOLTAGE GENERATION APPARATUS USED FOR SCANNING PROBE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To obtain an ultrashort-pulse high-voltage generation apparatus by which high-voltage ultrashort pulses, at 1 ns or lower, whose electric charge amount is controlled can be applied to a probe. SOLUTION: A very small capacity part 16 which is composed of a metal pole plate and an insulator is installed near a probe 4. A power-supply unit 2 for high-voltage ultarshort pulses is provided with a high-voltage charging and discharge circuit which is matched in impedance with a main coaxial cable 14 and which can be changed over to a positive voltage and a negative voltage. A center conductor 14A to which a high voltage is applied at the tip of the main coaxial cable 14 is connected to a metal pole plate 17 of the very small capacity part 16 which is insulated from the probe 4. A positive electric charge which is stored in the metal pole plate 17 of the very small capacity part 16 is discharged. A negative electric charge which is stored in the other electrode which is connected electrically to the probe 4 is applied to the probe 4. Alternatively, the negative electric charge which is stored is discharged inversely, and the positive electric charge is applied to the probe 4.