| 摘要 |
PROBLEM TO BE SOLVED: To obtain a heater controller which can perform high-precision temperature control by eliminating a conversion error at the time of transmission by a cable, etc., and make the whole temperature controller compact by eliminating the need for an exclusive signal line. SOLUTION: The heater controller which controls the electric power of a heater 14 according to the detected value from a temperature sensor 10 is constituted by integrating a temperature control part 32 which performs temperature detection and temperature setting by the temperature sensor 10 and a power control part 33 having a power element 39 controlling the electric power of the heater 14 and directly drives a gate driving circuit 40 for the power element 39 of the heater by a CPU 31 as one central processor according to the detected temperature.
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