| 摘要 |
PROBLEM TO BE SOLVED: To manufacture shallow pockets adaptable to a microscopic device. SOLUTION: In a method of manufacturing a semiconductor device, which forms source and drain regions 7 using a dummy gate electrode 40 and thereafter, the electrode 40 is removed to form a gate electrode, and after the electrode 40 is removed, an ion implantation for forming regions 52 of a pocket structure is performed so that an angle implantation 521 using a step implantation is performed in a groove, where the electrode 40 existed.
|
