PIEZOELECTRIC THREE-AXIS ACCELERATION SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a three-axis acceleration sensor without any need for using a signal amplification circuit. SOLUTION: Electrodes DX1 and DX2 for detecting X-axis acceleration and electrodes DY1 and DY2 for detecting Y-axis acceleration are constituted of charge generation parts X21 and Y11 for generating a spontaneous polarization charge and load parts X22 and Y12 that become a load for the charge generation parts X21 and Y11. As a result, by reducing the output level of an acceleration signal that is outputted from the electrodes DX1 and DX2 for detecting X-axis acceleration and the electrodes DY1 and DY2 for detecting Y-axis acceleration, the level of an X-axis acceleration detection signal that is obtained from each electrode for detection and the levels of a Y-axis acceleration detection signal and a Z-axis acceleration detection signal are set essentially equally when an acceleration with the same size operates on a weight 3 in the directions of X, Y, and Z axes.