SUPERLATTICE AVALANCHE PHOTODIODE

摘要

PROBLEM TO BE SOLVED: To enhance the synthetic performances for a measuring instrument by suppressing the decline in rapidity and high GB (gain band width) product while making feasible of increasing S/N by lowering dark current. SOLUTION: In the case of higher dark current due to the shortened superlattice doubling layer, the specific ionization ratio and the carrier saturation rate are enhanced by the extension of doubling layer. Furthermore, the decline in rapidity and high GB product is suppressed, and the thickness and concentration of a seat doped layer 2 are controlled, thereby making feasible of optimizing the field distribution in the extension of the superlattice doubling layer.