| 摘要 |
PROBLEM TO BE SOLVED: To attain a small and simple movement sensor by integrally-forming an angular velocity sensor detecting the Coriolis force which works energizing a plurality of legs and an acceleration sensor detecting a change in frequency by the acceleration of a frame type oscillation body. SOLUTION: The edge part of a base part 11 is fixed on a base 2, and external legs 12, 13 generate turning forks in the two feet of a cantilever beam having a parallel spring part. The feet 12, 13 are excited by the oscillator circuit of an angular velocity detecting circuit 5 connected to piezo-electric input and output 311, 312 taken out of its electrode film to determine angular velocity output 56 proportional to Coriolis force and generate an angular velocity sensor. A leg 14 includes an acceleration sensor function. Frame feet 141, 142 symmetrical with respect to a slit 151 are formed separately, and a terminal part 143 on the base part side is integrally-connected with a terminal part 144 on the other side to permit vibration under a symmetrical posture. The piezo-electric input and output 411, 412 are taken out of the exciting electrode film of the frame legs 141, 142, connected to the oscillator circuit of an acceleration detecting circuit 6 and energized to determine acceleration output 64 from a change in oscillation frequency. |
